Invention Grant
- Patent Title: Electron holography system
- Patent Title (中): 电子全息系统
-
Application No.: US11746096Application Date: 2007-05-09
-
Publication No.: US07791023B2Publication Date: 2010-09-07
- Inventor: Hiroto Kasai , Yutaka Kaneko
- Applicant: Hiroto Kasai , Yutaka Kaneko
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2006-161783 20060612
- Main IPC: G01N23/00
- IPC: G01N23/00 ; G21K7/00

Abstract:
In electron holography observation using a transmission electron microscope, searching of conditions of an electron optical condition which are necessary for realizing a requested spatial resolution is sophisticated and for persons unaccustomed to operation of the electron microscope, the observation is time consuming work. In addition to the fundamental electron microscope proper, an input unit for inputting a spatial resolution requested in the holography observation, a calculation unit for calculating positions of electron biprism and specimen necessary for realizing the requested spatial resolution from the inputted value and parameters characteristic of the device and mechanisms for moving the two positions for realizing the obtained calculation results are provided.
Public/Granted literature
- US20080067375A1 Electron Beam Holography Observation Apparatus Public/Granted day:2008-03-20
Information query