Invention Grant
- Patent Title: Method for producing chemical mechanical polishing pad
- Patent Title (中): 化学机械抛光垫的生产方法
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Application No.: US12253349Application Date: 2008-10-17
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Publication No.: US07790788B2Publication Date: 2010-09-07
- Inventor: Yukio Hosaka , Rikimaru Kuwabara
- Applicant: Yukio Hosaka , Rikimaru Kuwabara
- Applicant Address: JP Tokyo
- Assignee: JSR Corporation
- Current Assignee: JSR Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: D21H19/58
- IPC: D21H19/58 ; C08B37/02 ; B24D11/00

Abstract:
There is provided a method for producing a chemical mechanical polishing pad, the method comprising the steps of (1) producing a sheet-shaped polymer molded article and (2) irradiating the sheet-shaped polymer molded article with an electron beam within an irradiation dose of 10 to 400 kGy.A chemical mechanical polishing pad produced by the above method has advantages that it is excellent in removal rate and scratches and in-plane uniformity on a polished surface and that it shows a stable removal rate even when polishing a number of objects to be polished successively.
Public/Granted literature
- US20090104856A1 METHOD FOR PRODUCING CHEMICAL MECHANICAL POLISHING PAD Public/Granted day:2009-04-23
Information query
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