Invention Grant
US07790595B2 Manufacturing method improving the reliability of a bump electrode 失效
制造方法提高凸块电极的可靠性

Manufacturing method improving the reliability of a bump electrode
Abstract:
A method for manufacturing a semiconductor device comprises (a) forming a resin layer that includes at least a plurality of a first and a second resin parts, being separated from each other, over a semiconductor substrate having an electrode pad and a passivation film; (b) forming a resin projection in which the first and the second resin parts are integrated by curing the resin layer; and (c) forming a conductive layer that is being connected electrically to the electrode pad and extending over the resin projection, wherein in process (a), the second resin part is formed at least between the electrode pad and the first resin part at a width less than the first resin part.
Public/Granted literature
Information query
Patent Agency Ranking
0/0