Invention Grant
US07790552B2 Method for fabricating semiconductor device with bulb-shaped recess gate
失效
制造具有灯泡形凹槽的半导体器件的方法
- Patent Title: Method for fabricating semiconductor device with bulb-shaped recess gate
- Patent Title (中): 制造具有灯泡形凹槽的半导体器件的方法
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Application No.: US11803059Application Date: 2007-05-11
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Publication No.: US07790552B2Publication Date: 2010-09-07
- Inventor: Sang-Hoon Cho
- Applicant: Sang-Hoon Cho
- Applicant Address: KR
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR
- Agency: Blakely, Sokoloff, Taylor & Zafman
- Priority: KR10-2006-0122021 20061205
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A method for fabricating a semiconductor device includes forming a plurality of bulb-shaped recesses in a substrate, forming a gate insulation layer over the substrate including the bulb-shaped recesses, forming a patterned first conductive layer over sidewalls of a bulb pattern of the corresponding bulb-shaped recesses, and forming a patterned second conductive layer over the gate insulation layer while filling the bulb-shaped recesses.
Public/Granted literature
- US20080132051A1 Method for fabricating semiconductor device with bulb-shaped recess gate Public/Granted day:2008-06-05
Information query
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