Invention Grant
US07769069B2 Integrated semiconductor laser diode module and manufacturing method of the same
失效
集成半导体激光二极管模块及其制造方法相同
- Patent Title: Integrated semiconductor laser diode module and manufacturing method of the same
- Patent Title (中): 集成半导体激光二极管模块及其制造方法相同
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Application No.: US11067472Application Date: 2005-02-28
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Publication No.: US07769069B2Publication Date: 2010-08-03
- Inventor: Yasuhiko Nomura , Yasuyuki Bessho , Masayuki Hata , Tsutomu Yamaguchi
- Applicant: Yasuhiko Nomura , Yasuyuki Bessho , Masayuki Hata , Tsutomu Yamaguchi
- Applicant Address: JP Osaka
- Assignee: Sanyo Electric Co., Ltd.
- Current Assignee: Sanyo Electric Co., Ltd.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2004-100318 20040330
- Main IPC: H01S5/00
- IPC: H01S5/00

Abstract:
Improving the lifetime of an integrated semiconductor laser diode module into which a GaN semiconductor laser diode and a GaP semiconductor laser diode are integrated, and the lasing properties of the laser diodes. Prior to a joining step of an LD 1 wafer that is made of a nitride semiconductor structure formed on a GaN substrate and an LD 2 wafer that is made of an aluminum gallium indium phosphide semiconductor structure, a facet of a resonator of the nitride semiconductor structure is formed by etching. A facet of a resonator of the aluminum gallium indium phosphide semiconductor structure is formed, after the joining step, by cleaving. The wafers are joined so that the facets of the resonators of the nitride semiconductor structure and aluminum gallium indium phosphide semiconductor structure are out of alignment in a lengthwise direction of the resonators.
Public/Granted literature
- US20050232327A1 Integrated semiconductor laser diode module and manufacturing method of the same Public/Granted day:2005-10-20
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