Invention Grant
- Patent Title: Method and system for wavefront measurements of an optical system
- Patent Title (中): 光学系统的波前测量方法和系统
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Application No.: US12178524Application Date: 2008-07-23
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Publication No.: US07768653B2Publication Date: 2010-08-03
- Inventor: Azat Latypov , Sherman K. Poultney , Yuli Vladimirsky
- Applicant: Azat Latypov , Sherman K. Poultney , Yuli Vladimirsky
- Applicant Address: NL Veldhoven
- Assignee: ASML Hodling N.V.
- Current Assignee: ASML Hodling N.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox, P.L.L.C.
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
A wavefront measurement system includes a source of electromagnetic radiation. An illumination system delivers the electromagnetic radiation to an object plane. A source of a diffraction pattern is in the object plane. A projection optical system projects the diffraction pattern onto an image plane, which includes a mechanism (e.g., a shearing grating) to introduce the lateral shear. A detector is located optically conjugate with the pupil of the projection optical system, and receives an instant fringe pattern, resulting from the interference between sheared wavefronts, from the image plane. The diffraction pattern is dynamically scanned across a pupil of the projection optical system, and the resulting time-integrated interferogram obtained from the detector is used to measure the wavefront aberration across the entire pupil.
Public/Granted literature
- US20090021748A1 Method and system for wavefront measurements of an optical system Public/Granted day:2009-01-22
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