Invention Grant
US07768267B2 Ionization gauge with a cold electron source 有权
具有冷电子源的电离计

Ionization gauge with a cold electron source
Abstract:
An ionization gauge that eliminates a hot cathode or filament, but maintains a level of precision of gas density measurements approaching that of a hot cathode ionization gauge. The ionization gauge includes a collector electrode disposed in an ionization volume, an electron source without a heated cathode, and an electrostatic shutter that regulates the flow of electrons between the electron source and the ionization volume. The electrostatic shutter controls the flow of electrons based on feedback from an anode defining the ionization volume. The electron source can be a Penning or glow discharge ionization gauge.
Public/Granted literature
Information query
Patent Agency Ranking
0/0