Invention Grant
- Patent Title: Ionization gauge with a cold electron source
- Patent Title (中): 具有冷电子源的电离计
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Application No.: US11827370Application Date: 2007-07-11
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Publication No.: US07768267B2Publication Date: 2010-08-03
- Inventor: Richard A. Knott , Gerardo A. Brucker , Paul C. Arnold
- Applicant: Richard A. Knott , Gerardo A. Brucker , Paul C. Arnold
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Hamilton, Brook, Smith & Reynolds, P.C.
- Main IPC: G01L21/30
- IPC: G01L21/30 ; G01L21/32 ; H05B31/26

Abstract:
An ionization gauge that eliminates a hot cathode or filament, but maintains a level of precision of gas density measurements approaching that of a hot cathode ionization gauge. The ionization gauge includes a collector electrode disposed in an ionization volume, an electron source without a heated cathode, and an electrostatic shutter that regulates the flow of electrons between the electron source and the ionization volume. The electrostatic shutter controls the flow of electrons based on feedback from an anode defining the ionization volume. The electron source can be a Penning or glow discharge ionization gauge.
Public/Granted literature
- US20090015264A1 Ionization gauge with a cold electron source Public/Granted day:2009-01-15
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