Invention Grant
- Patent Title: Piezoelectric device, piezoelectric actuator, and liquid discharge device having piezoelectric films
- Patent Title (中): 压电器件,压电致动器和具有压电膜的液体放电器件
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Application No.: US12178761Application Date: 2008-07-24
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Publication No.: US07768178B2Publication Date: 2010-08-03
- Inventor: Takamichi Fujii , Tsuyoshi Mita , Yoshikazu Hishinuma
- Applicant: Takamichi Fujii , Tsuyoshi Mita , Yoshikazu Hishinuma
- Applicant Address: JP Tokyo
- Assignee: Fujifilm Corporation
- Current Assignee: Fujifilm Corporation
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2007/196199 20070727; JP2008/162975 20080623
- Main IPC: H01L41/04
- IPC: H01L41/04 ; B41J2/45

Abstract:
In a piezoelectric device, a first electrode, a first piezoelectric film, a second piezoelectric film, and a second electrode are formed in this order on a first electrode formed above a surface of the substrate, and an intermediate electrode is arranged between the first and second piezoelectric films. Each of the first and second piezoelectric films has a thickness of 10 micrometers or smaller, and has a first surface facing toward the substrate and a second surface opposite to the first surface. At least one of the first and second surfaces has an arithmetic average surface roughness (Ra) of 0.5 micrometers or smaller.
Public/Granted literature
- US20090026887A1 PIEZOELECTRIC DEVICE, PIEZOELECTRIC ACTUATOR, AND LIQUID DISCHARGE DEVICE Public/Granted day:2009-01-29
Information query
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