Invention Grant
US07768178B2 Piezoelectric device, piezoelectric actuator, and liquid discharge device having piezoelectric films 有权
压电器件,压电致动器和具有压电膜的液体放电器件

Piezoelectric device, piezoelectric actuator, and liquid discharge device having piezoelectric films
Abstract:
In a piezoelectric device, a first electrode, a first piezoelectric film, a second piezoelectric film, and a second electrode are formed in this order on a first electrode formed above a surface of the substrate, and an intermediate electrode is arranged between the first and second piezoelectric films. Each of the first and second piezoelectric films has a thickness of 10 micrometers or smaller, and has a first surface facing toward the substrate and a second surface opposite to the first surface. At least one of the first and second surfaces has an arithmetic average surface roughness (Ra) of 0.5 micrometers or smaller.
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