Invention Grant
- Patent Title: Method for manufacturing an EEPROM cell
- Patent Title (中): EEPROM单元的制造方法
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Application No.: US12354854Application Date: 2009-01-16
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Publication No.: US07767532B2Publication Date: 2010-08-03
- Inventor: Stephan Niel
- Applicant: Stephan Niel
- Applicant Address: FR Rousset
- Assignee: STMicroelectronics (Rousset) SAS
- Current Assignee: STMicroelectronics (Rousset) SAS
- Current Assignee Address: FR Rousset
- Agency: Wolf, Greenfield & Sacks, P.C.
- Agent Lisa K. Jorgenson; James H. Morris
- Priority: FR0850350 20080121
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/80

Abstract:
A method for manufacturing an EEPROM cell including a dual-gate MOS transistor. The method includes the steps of providing a semiconductor substrate covered with a stack of first and second layers, forming at least one first opening in the second layer, forming, in the first layer, a second opening continuing the first opening, enlarging the first opening by isotropic etching, forming a first doped region in the substrate by implantation through the first enlarged opening, the first doped region taking part in the forming of the transistor drain or source, forming, in the third opening, a thinned-down insulating portion thinner than the first layer, and forming the gates of the MOS transistor at least partially extending over the thinned-down insulating portion.
Public/Granted literature
- US20090186460A1 METHOD FOR MANUFACTURING AN EEPROM CELL Public/Granted day:2009-07-23
Information query
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