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US07765660B2 Method of manufacturing a multilayered piezoelectric element having internal electrodes and side electrodes 失效
具有内部电极和侧面电极的多层压电元件的制造方法

  • Patent Title: Method of manufacturing a multilayered piezoelectric element having internal electrodes and side electrodes
  • Patent Title (中): 具有内部电极和侧面电极的多层压电元件的制造方法
  • Application No.: US12126459
    Application Date: 2008-05-23
  • Publication No.: US07765660B2
    Publication Date: 2010-08-03
  • Inventor: Tetsu Miyoshi
  • Applicant: Tetsu Miyoshi
  • Applicant Address: JP Tokyo
  • Assignee: FUJIFILM Corporation
  • Current Assignee: FUJIFILM Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Sughrue Mion, PLLC
  • Priority: JP2005-342915 20051128
  • Main IPC: H01L41/22
  • IPC: H01L41/22
Method of manufacturing a multilayered piezoelectric element having internal electrodes and side electrodes
Abstract:
A method of manufacturing a multilayered piezoelectric element having a multilayered structure by which an internal electrode and a side electrode are strongly connected. The method includes the steps of: forming first and second side surfaces by dicing the multilayered structure to protrude end portions of first and second electrode layers to an outer side than adjacent piezoelectric material layers and secure insulating regions between each electrode layer and respective one side surface; and forming a first side electrode on the first side surface and a second side electrode on the second side surface.
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