Invention Grant
- Patent Title: Method and apparatus for laser control in a two chamber gas discharge laser
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Application No.: US12255385Application Date: 2008-10-21
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Publication No.: US07751453B2Publication Date: 2010-07-06
- Inventor: Robert N. Jacques
- Applicant: Robert N. Jacques
- Applicant Address: US CA San Diego
- Assignee: Cymer, Inc.
- Current Assignee: Cymer, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Gard & Kaslow LLP
- Main IPC: H01S3/00
- IPC: H01S3/00 ; H01S3/22 ; H01S3/223

Abstract:
A laser control system contains an oscillator gas chamber and an amplifier gas chamber. A first voltage input is operatively connected to deliver electrical pulses to a first pair of electrodes within the oscillator gas chamber and a second pair of electrodes within the amplifier gas chamber. An output of the gas chambers is an energy dose calculated by a trapezoidal window. A control circuit connects to the first voltage input for modifying the first voltage input. A feedback control loop communicates an output of the gas chambers to the control circuit for modifying the first voltage input.
Public/Granted literature
- US20100098124A1 METHOD AND APPARATUS FOR LASER CONTROL IN A TWO CHAMBER GAS DISCHARGE LASER Public/Granted day:2010-04-22
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