Invention Grant
- Patent Title: Method and device for contacting semiconductor chips
- Patent Title (中): 用于接触半导体芯片的方法和装置
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Application No.: US10570256Application Date: 2004-08-28
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Publication No.: US07727861B2Publication Date: 2010-06-01
- Inventor: Martin Michalk , Manfred Michalk , Sabine Nieland
- Applicant: Martin Michalk , Manfred Michalk , Sabine Nieland
- Applicant Address: SE Stockholm
- Assignee: Assa Abloy AB
- Current Assignee: Assa Abloy AB
- Current Assignee Address: SE Stockholm
- Agency: Sheridan Ross P.C.
- Priority: DE10341186 20030906
- International Application: PCT/DE2004/001900 WO 20040828
- International Announcement: WO2005/027200 WO 20050324
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
The invention relates to a method and device that make it possible to increase the productivity of the chip bonding and the before and after working steps associated with the chip bonding. To this end, the invention provides a method for contacting semiconductor chips (3) on a metallic substrate (16), whereby an etch resist (27) is located at least on one substrate side, and semiconductor chips (3) are contacted on the contacting side (30) by means of flip-chip bonding processes, during which a contacting region (7) is created on the contacting side (30) of the substrate (16). A semiconductor chip (3) having two contact bumps (6) is contacted on said contacting region in such a manner that: a contact bump (6) is contacted on both sides of a structure line (35) or of a structure trench (13) dividing the contacting region (7), and; after the contacting, an underfilling of the chip (3) ensues after which an electrically insulating passage (14) is made in the contacting region (7), and a module (32), which supports the semiconductor chip (3), is removed from the substrate (16).
Public/Granted literature
- US20070163992A1 Method and device for contacting semiconductor chips Public/Granted day:2007-07-19
Information query
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