Invention Grant
- Patent Title: Electromigration fuse and method of fabricating same
- Patent Title (中): 电流保险丝及其制造方法
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Application No.: US11869227Application Date: 2007-10-09
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Publication No.: US07709928B2Publication Date: 2010-05-04
- Inventor: Deok-kee Kim , Haining Sam Yang
- Applicant: Deok-kee Kim , Haining Sam Yang
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Schmeiser, Olsen & Watts
- Agent Ian D. MacKinnon
- Main IPC: H01L29/00
- IPC: H01L29/00

Abstract:
Fuses and methods of forming fuses. The fuse includes: a dielectric layer on a semiconductor substrate; a cathode stack on the dielectric layer, a sidewall of the cathode stack extending from a top surface of the cathode stack to a top surface of the dielectric layer; a continuous polysilicon layer comprising a cathode region, an anode region, a link region between the cathode and anode regions and a transition region between the cathode region and the link region, the transition region proximate to the sidewall of the cathode stack, the cathode region on a top surface of the cathode stack, the link region on a top surface of the dielectric layer, both a first thickness of the cathode region and a second thickness of the link region greater than a third thickness of the transition region; and a metal silicide layer on a top surface of the polysilicon layer.
Public/Granted literature
- US20090090994A1 ELECTROMIGRATION FUSE AND METHOD OF FABRICATING SAME Public/Granted day:2009-04-09
Information query
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