Invention Grant
- Patent Title: Device structures for active devices fabricated using a semiconductor-on-insulator substrate and design structures for a radiofrequency integrated circuit
- Patent Title (中): 使用绝缘体上半导体衬底制造的有源器件的器件结构和用于射频集成电路的设计结构
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Application No.: US12108924Application Date: 2008-04-24
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Publication No.: US07709926B2Publication Date: 2010-05-04
- Inventor: Wagdi W. Abadeer , Kiran V. Chatty , Robert J. Gauthier , Jed H. Rankin , Robert R. Robison , William R. Tonti
- Applicant: Wagdi W. Abadeer , Kiran V. Chatty , Robert J. Gauthier , Jed H. Rankin , Robert R. Robison , William R. Tonti
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Wood, Herron & Evans, LLP
- Main IPC: H01L29/06
- IPC: H01L29/06

Abstract:
Device structure for active devices fabricated in a semiconductor-on-insulator (SOI) substrate and design structures for a radiofrequency integrated circuit. The device structure includes a first isolation region in the semiconductor layer that extends from a top surface of a semiconductor layer to a first depth, a second isolation region in the semiconductor layer that extends from the top surface of the semiconductor layer to a second depth greater than the first depth, and a first doped region in the semiconductor layer. The first doped region is disposed vertically between the first isolation region and an insulating layer disposed between the semiconductor layer and a handle wafer of the SOI substrate. The device structure may be included in a design structure embodied in a machine readable medium for designing, manufacturing, or testing an integrated circuit.
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