Invention Grant
- Patent Title: Semiconductor device having freestanding semiconductor layer
- Patent Title (中): 具有独立半导体层的半导体器件
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Application No.: US11426698Application Date: 2006-06-27
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Publication No.: US07709892B2Publication Date: 2010-05-04
- Inventor: Brent A. Anderson , Edward J. Nowak , BethAnn Rainey
- Applicant: Brent A. Anderson , Edward J. Nowak , BethAnn Rainey
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Richard Kotulak Hoffman Warnick LLC
- Main IPC: H01L29/94
- IPC: H01L29/94 ; H01L27/88

Abstract:
A method of providing a freestanding semiconductor layer on a conventional SOI or bulk-substrate silicon device includes forming an amorphous or polycrystalline mandrel on a monocrystalline base structure. A conformal polycrystalline semiconductor layer is then formed on the mandrel and on the base structure, wherein the polycrystalline layer contacts the base structure. The polycrystalline semiconductor layer is then recrystallized so that it has a crystallinity substantially similar to that of the base structure. Thus, a freestanding semiconductor layer is formed with a high degree of control of the thickness and height thereof and maintaining a uniformity of thickness.
Public/Granted literature
- US20060231929A1 SEMICONDUCTOR DEVICE HAVING FREESTANDING SEMICONDUCTOR LAYER Public/Granted day:2006-10-19
Information query
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