Invention Grant
US07709884B2 Non-volatile two transistor semiconductor memory cell and method for producing the same
有权
非挥发性双晶体管半导体存储单元及其制造方法
- Patent Title: Non-volatile two transistor semiconductor memory cell and method for producing the same
- Patent Title (中): 非挥发性双晶体管半导体存储单元及其制造方法
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Application No.: US11331473Application Date: 2006-01-13
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Publication No.: US07709884B2Publication Date: 2010-05-04
- Inventor: Franz Schuler , Georg Tempel
- Applicant: Franz Schuler , Georg Tempel
- Applicant Address: DE Munich
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Munich
- Agency: Brinks Hofer Gilson & Lione
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/788 ; H01L21/8247

Abstract:
The invention relates to a nonvolatile two-transistor semiconductor memory cell and an associated fabrication method, source and drain regions (2) for a selection transistor (AT) and a memory transistor (ST) being formed in a substrate (1). The memory transistor (ST) has a first insulation layer (3), a charge storage layer (4), a second insulation layer (5) and a memory transistor control layer (6), while the selection transistor (AT) has a first insulation layer (3′) and a selection transistor control layer (4*). By using different materials for the charge storage layer (4) and the selection transistor control layer (4*), it is possible to significantly improve the charge retention properties of the memory cell by adapting the substrate doping with electrical properties remaining the same.
Public/Granted literature
- US20060118865A1 Non-volatile two transistor semiconductor memory cell and method for producing the same Public/Granted day:2006-06-08
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