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US07709782B2 Optical assembly with adjustable optical element and independently tunable position sensors 失效
具有可调光学元件和独立可调位置传感器的光学组件

Optical assembly with adjustable optical element and independently tunable position sensors
Abstract:
A device assembly (16) for a precision apparatus (10) includes a device housing (30), a device (32), a device mover assembly (34), and a measurement system (36). The device mover assembly (34) moves the device (32) relative to the device housing (30) about a first axis and about a second axis that is orthogonal to the first axis. The measurement system (36) monitors movement of the device (32). The measurement system (36) monitors movement of the device (32) and can include a first sensor assembly (260) that monitors movement about the first axis and a second sensor assembly (262) that monitors movement about a second axis. Each sensor assembly (260) (262) can include a sensor adjuster (474) (476) that adjusts the position of a portion of the respective sensor assembly (260) (262) to independently tune the sensor assemblies (260) (262) and independently enhance the performance of each sensor assembly (260) (262). Further, each sensor assembly (260) (262) can be a magnetic type sensor.
Abstract(Chinese):

一种用于精密设备（10）的设备组件（16）包括设备壳体（30），设备（32），设备移动器组件（34）和测量系统（36）。 装置移动器组件（34）围绕第一轴线和与第一轴线正交的第二轴线相对于装置壳体（30）移动装置（32）。 测量系统（36）监视设备（32）的移动。 测量系统（36）监测设备（32）的运动并且可以包括监测关于第一轴线的运动的第一传感器组件（260）和监测关于第二轴线的运动的第二传感器组件（262）。 每个传感器组件（260）（262）可以包括传感器调节器（474）（476），其调节相应传感器组件（260）（262）的一部分的位置以独立调谐传感器组件（260）（262） 并且独立地增强每个传感器组件（260）（262）的性能。 此外，每个传感器组件（260）（262）可以是磁性传感器。

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