Invention Grant
- Patent Title: Laser processing method
- Patent Title (中): 激光加工方法
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Application No.: US11658703Application Date: 2005-07-14
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Publication No.: US07709767B2Publication Date: 2010-05-04
- Inventor: Takeshi Sakamoto
- Applicant: Takeshi Sakamoto
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: Hamamatsu Photonics K.K.
- Current Assignee: Hamamatsu Photonics K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- Priority: JPP2004-224505 20040730
- International Application: PCT/JP2005/013055 WO 20050714
- International Announcement: WO2006/011372 WO 20060202
- Main IPC: B23K26/40
- IPC: B23K26/40

Abstract:
A laser processing method by which an object to be processed can be cut with a high precision is provided. The laser processing method of the present invention irradiates a planar object to be processed 1 with laser light L while locating a light-converging point P within the object 1. Initially, a first modified region 71 to become a start point for cutting is formed along a first line to cut 5a in the object 1. Subsequently, along a second line to cut 5b intersecting the line to cut 5a, a second modified region 72 to become a start point for cutting is formed so as to intersect at least a part of the modified region 71. Then, a fourth modified region 73 to become a start point for cutting is formed along the line to cut 5b. Thereafter, between the modified region 71 and an entrance face 1a of the object 1 where the laser light L is incident, a third modified region 74 to become a start point for cutting is formed along the line to cut 5a so as to intersect at least a part of the modified region 73.
Public/Granted literature
- US20090026185A1 Laser Processing Method Public/Granted day:2009-01-29
Information query
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