Invention Grant
US07709367B2 Method for fabricating storage node contact in semiconductor device 失效
在半导体器件中制造存储节点接触的方法

Method for fabricating storage node contact in semiconductor device
Abstract:
A method for fabricating a storage node contact in a semiconductor device includes forming a landing plug over a substrate, forming a first insulation layer over the landing plug, forming a bit line pattern over the first insulation layer, forming a second insulation layer over the bit line pattern, forming a mask pattern for forming a storage node contact over the second insulation layer, etching the second and first insulation layers until the landing plug is exposed to form a storage node contact hole including a portion having a rounded profile, filling a conductive material in the storage node contact hole to form a contact plug, and forming a storage node over the contact plug.
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