Invention Grant
US07709367B2 Method for fabricating storage node contact in semiconductor device
失效
在半导体器件中制造存储节点接触的方法
- Patent Title: Method for fabricating storage node contact in semiconductor device
- Patent Title (中): 在半导体器件中制造存储节点接触的方法
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Application No.: US11761577Application Date: 2007-06-12
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Publication No.: US07709367B2Publication Date: 2010-05-04
- Inventor: Hae-Jung Lee , Ik-Soo Choi , Chang-Youn Hwang , Mi-Hyune You
- Applicant: Hae-Jung Lee , Ik-Soo Choi , Chang-Youn Hwang , Mi-Hyune You
- Applicant Address: KR Kyoungki-Do
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Kyoungki-Do
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Priority: KR10-2006-0060056 20060630; KR10-2007-0037837 20070418
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
A method for fabricating a storage node contact in a semiconductor device includes forming a landing plug over a substrate, forming a first insulation layer over the landing plug, forming a bit line pattern over the first insulation layer, forming a second insulation layer over the bit line pattern, forming a mask pattern for forming a storage node contact over the second insulation layer, etching the second and first insulation layers until the landing plug is exposed to form a storage node contact hole including a portion having a rounded profile, filling a conductive material in the storage node contact hole to form a contact plug, and forming a storage node over the contact plug.
Public/Granted literature
- US20080003811A1 METHOD FOR FABRICATING STORAGE NODE CONTACT IN SEMICONDUCTOR DEVICE Public/Granted day:2008-01-03
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