Invention Grant
US07709182B2 Composition for forming antireflection film, layered product, and method of forming resist pattern 有权
用于形成抗反射膜的组合物,层叠体,以及形成抗蚀剂图案的方法

  • Patent Title: Composition for forming antireflection film, layered product, and method of forming resist pattern
  • Patent Title (中): 用于形成抗反射膜的组合物,层叠体,以及形成抗蚀剂图案的方法
  • Application No.: US11792077
    Application Date: 2005-11-28
  • Publication No.: US07709182B2
    Publication Date: 2010-05-04
  • Inventor: Nakaatsu YoshimuraKeiji Konno
  • Applicant: Nakaatsu YoshimuraKeiji Konno
  • Applicant Address: JP Tokyo
  • Assignee: JSR Corporation
  • Current Assignee: JSR Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Ditthavong Mori & Steiner, P.C.
  • Priority: JP2004-350632 20041203
  • International Application: PCT/JP2005/021756 WO 20051128
  • International Announcement: WO2006/059555 WO 20060608
  • Main IPC: G03F7/11
  • IPC: G03F7/11 G03F7/30
Composition for forming antireflection film, layered product, and method of forming resist pattern
Abstract:
An antireflection film-forming composition which has excellent applicability, is significantly inhibited from generating ultrafine microbubbles, gives an antireflection film capable of sufficiently reducing the standing-wave effect, and has excellent solubility in water and an alkaline developing solution. The antireflection film-forming composition contains: (A) a copolymer (salt) of a sulfonic acid group-containing acrylamide derivative represented by, e.g., 2-(meth)acrylamido-2-methylpropanesulfonic acid and a fluoroalkyl group-containing acrylic acid ester derivative represented by, e.g., 2,2,3,3,3-pentafluoropropyl (meth)acrylate; and (B) a surfactant whose 0.1 wt. % aqueous solution has a surface tension as measured at 25° C. of 45 mN/m or lower.
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