Invention Grant
- Patent Title: Bolt and plasma processing apparatus provided with same
- Patent Title (中): 螺栓和等离子体处理装置
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Application No.: US11263955Application Date: 2005-11-02
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Publication No.: US07708834B2Publication Date: 2010-05-04
- Inventor: Makoto Horimizu
- Applicant: Makoto Horimizu
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2004-319411 20041102
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23F1/00 ; H01L21/306

Abstract:
A bolt which is driven into a female screw portion disposed in a brittle member in a wear environment includes a head formed of a wear resistant material, a body which is formed of a resin having elasticity or plasticity and has a first male screw portion, and a placed member disposed between the head and the body and formed of a wear resistant resin having elasticity or plasticity. The body further includes a second male screw portion disposed along a central axis of the body and the head includes a female screw portion which the second male screw portion is driven into. The placed member is of a plate shape and has a through hole in its central portion, and a diameter of the through hole is smaller than or equal to a nominal diameter of the first male screw portion and larger than or equal to a nominal diameter of the second male screw portion.
Public/Granted literature
- US20060118042A1 Bolt and plasma processing apparatus provided with same Public/Granted day:2006-06-08
Information query
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