Invention Grant
US07708372B2 Inkjet nozzle with ink feed channels etched from back of wafer 失效
具有从晶片背面蚀刻的墨水供给通道的喷墨喷嘴

  • Patent Title: Inkjet nozzle with ink feed channels etched from back of wafer
  • Patent Title (中): 具有从晶片背面蚀刻的墨水供给通道的喷墨喷嘴
  • Application No.: US10922877
    Application Date: 2004-08-23
  • Publication No.: US07708372B2
    Publication Date: 2010-05-04
  • Inventor: Kia Silverbrook
  • Applicant: Kia Silverbrook
  • Applicant Address: AU Balmain, New South Wales
  • Assignee: Silverbrook Research Pty Ltd
  • Current Assignee: Silverbrook Research Pty Ltd
  • Current Assignee Address: AU Balmain, New South Wales
  • Priority: AUPO7991 19970715; AUPO8004 19970715
  • Main IPC: B41J2/015
  • IPC: B41J2/015 B41J2/04
Inkjet nozzle with ink feed channels etched from back of wafer
Abstract:
An inkjet printhead with a wafer substrate and an array of ink ejection nozzles formed on the front side by lithographic etching and deposition techniques; and,a plurality elongate ink feed channels etched from the back side for supplying ink to the nozzles.Etching the ink feed channels from the back surface of the wafer removes the need for ink feed channels beside the chambers. This provides more room for the power and print data connections to each nozzle along the front surface of the wafer. Individual ink feed channels for each nozzle eliminates fluidic cross talk between adjacent nozzles. An ink feed channel that supplies several nozzles from the side of each chamber needs to incorporate special features such as pinch points to deal with fluidic cross talk. However, a back etched ink feed channel can supply several nozzles without fluidic cross talk.
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