Invention Grant
- Patent Title: Method for producing synthetic quartz glass with predetermined hydroxyl group content
- Patent Title (中): 具有预定羟基含量的合成石英玻璃的生产方法
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Application No.: US11801386Application Date: 2007-05-09
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Publication No.: US07707855B2Publication Date: 2010-05-04
- Inventor: Stephan Ochs , Bodo Kuehn
- Applicant: Stephan Ochs , Bodo Kuehn
- Applicant Address: DE Hanau
- Assignee: Heraeus Quarzglas GmbH & Co. KG
- Current Assignee: Heraeus Quarzglas GmbH & Co. KG
- Current Assignee Address: DE Hanau
- Agency: Tiajoloff and Kelly LLP
- Priority: DE102006022303 20060511
- Main IPC: C03B37/018
- IPC: C03B37/018

Abstract:
A known method for producing synthetic quartz glass with a predetermined hydroxyl group content comprises the following steps: a porous SiO2 soot body is produced by flame hydrolysis or oxidation of a silicon-containing start compound and by layerwise deposition of SiO2 particles on a rotating support; the soot body is subjected to a dehydration treatment in a reaction gas-containing drying atmosphere at a drying temperature for removing hydroxyl groups; and the SiO2 soot body is vitrified into a body consisting of the synthetic quartz glass. Starting from this, and in order to permit a reproducible and reliable manufacture of synthetic, UV-radiation resistant quartz glass with predetermined hydroxyl group content and low chlorine content, it is suggested according to the invention that the dehydration treatment according to method step (b) comprises a drying phase during which ozone is used as the reaction gas, whereby the ozone content of the drying atmosphere is between 0.5% by vol. and 10% by vol. and the drying temperature is chosen in the range between 1200° C. and 1400° C., and whereby no halogens are supplied to the drying atmosphere.
Public/Granted literature
- US20070261442A1 Method for producing synthetic quartz glass with predetermined hydroxyl group content Public/Granted day:2007-11-15
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