Invention Grant
- Patent Title: Electret condenser
- Patent Title (中): 驻极体冷凝器
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Application No.: US10591456Application Date: 2005-02-24
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Publication No.: US07706554B2Publication Date: 2010-04-27
- Inventor: Hiroshi Ogura , Tohru Yamaoka
- Applicant: Hiroshi Ogura , Tohru Yamaoka
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2004-058435 20040303
- International Application: PCT/JP2005/003030 WO 20050224
- International Announcement: WO2005/086534 WO 20050915
- Main IPC: H04R25/00
- IPC: H04R25/00 ; H01L29/78
Abstract:
An electret condenser 2 includes a fixed electrode 6, a vibrating electrode 5, an electretized silicon dioxide film 7 formed between the electrodes, and silicon nitride films 8 and 9 formed so as to cover the silicon dioxide film 7. The silicon dioxide film 7 covered with the silicon nitride films 8 and 9 is formed on the vibrating electrode 5.
Public/Granted literature
- US20070217635A1 Electret Condenser Public/Granted day:2007-09-20
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