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US07705621B2 Test pattern and method of monitoring defects using the same 失效
使用相同的测试模式和监测缺陷的方法

Test pattern and method of monitoring defects using the same
Abstract:
A test pattern includes a normal pattern, an abnormal pattern having predetermined defects, and a conductive line electrically connected to the normal pattern and electrically isolated from the abnormal pattern. Thus, a non-contact test process and a contact test process may be compatible with the single test pattern.
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