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US07705406B2 Transistor array with selected subset having suppressed layout sensitivity of threshold voltage 有权
具有选定子集的晶体管阵列具有抑制阈值电压的布局灵敏度

Transistor array with selected subset having suppressed layout sensitivity of threshold voltage
Abstract:
A method for smoothing variations in threshold voltage in an integrated circuit layout. The method begins by identifying recombination surfaces associated with transistors in the layout. Such recombination surfaces are treated to affect the recombination of interstitial atoms adjacent such surfaces, thus minimizing variations in threshold voltage of transistors within the layout.
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