Invention Grant
US07705331B1 Methods and systems for providing illumination of a specimen for a process performed on the specimen
有权
用于提供样品照射的方法和系统，用于在样品上进行的过程
- Patent Title: Methods and systems for providing illumination of a specimen for a process performed on the specimen
- Patent Title (中): 用于提供样品照射的方法和系统，用于在样品上进行的过程
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Application No.: US11771430Application Date: 2007-06-29
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Publication No.: US07705331B1Publication Date: 2010-04-27
- Inventor: Greg Kirk , Rich Solarz , Chris Kirk , Gil Delgado , Anatoly Schemelinin , Jim Li , Qibiao Chen , Charles Nenghe Wang
- Applicant: Greg Kirk , Rich Solarz , Chris Kirk , Gil Delgado , Anatoly Schemelinin , Jim Li , Qibiao Chen , Charles Nenghe Wang
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Technologies Corp.
- Current Assignee: KLA-Tencor Technologies Corp.
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G21G4/00
- IPC: G21G4/00
Abstract:
Methods and systems for providing illumination of a specimen for a process performed on the specimen are provided. One system configured to provide illumination of a specimen for a process performed on the specimen includes a laser configured to generate excitation light. The system also includes focusing optics configured to focus the excitation light to a plasma in an electrodeless lamp such that the plasma generates light. The system is also configured such that the light illuminates the specimen during the process.
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