Invention Grant
- Patent Title: Heat treatment equipment and method of driving the same
- Patent Title (中): 热处理设备及其驱动方法
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Application No.: US11528751Application Date: 2006-09-28
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Publication No.: US07700898B2Publication Date: 2010-04-20
- Inventor: Dae-Man Seo , Jang-Hyeok Lee , Dae-Woo Kim
- Applicant: Dae-Man Seo , Jang-Hyeok Lee , Dae-Woo Kim
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Mills & Onello, LLP
- Priority: KR10-2005-0093072 20051004
- Main IPC: F27B5/00
- IPC: F27B5/00 ; F27B5/10 ; F27B5/18 ; F27D1/18

Abstract:
Heat treatment equipment and a method of driving the same are provided. The heat treatment equipment includes: a process tube having an aperture at one side thereof; a sealing unit for opening or closing the aperture; and a pressure sensor for measuring sealing pressure between the sealing unit and the one side of the process tube. In the heat treatment equipment, the aperture of the process tube can be sealed according to the sealing pressure of the sealing unit so that the process tube can be precisely sealed.
Public/Granted literature
- US20070080156A1 Heat treatment equipment and method of driving the same Public/Granted day:2007-04-12
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