Invention Grant
US07700898B2 Heat treatment equipment and method of driving the same 有权
热处理设备及其驱动方法

Heat treatment equipment and method of driving the same
Abstract:
Heat treatment equipment and a method of driving the same are provided. The heat treatment equipment includes: a process tube having an aperture at one side thereof; a sealing unit for opening or closing the aperture; and a pressure sensor for measuring sealing pressure between the sealing unit and the one side of the process tube. In the heat treatment equipment, the aperture of the process tube can be sealed according to the sealing pressure of the sealing unit so that the process tube can be precisely sealed.
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