Invention Grant
US07675786B2 Method of operating a semiconductor memory device having a recessed control gate electrode
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操作具有凹陷控制栅电极的半导体存储器件的方法
- Patent Title: Method of operating a semiconductor memory device having a recessed control gate electrode
- Patent Title (中): 操作具有凹陷控制栅电极的半导体存储器件的方法
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Application No.: US11898709Application Date: 2007-09-14
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Publication No.: US07675786B2Publication Date: 2010-03-09
- Inventor: Sang-jin Park , In-jun Hwang , Jae-woong Hyun , Yoon-dong Park , Kwang-soo Seol , Sang-min Shin , Sang-moo Choi , Ju-hee Park
- Applicant: Sang-jin Park , In-jun Hwang , Jae-woong Hyun , Yoon-dong Park , Kwang-soo Seol , Sang-min Shin , Sang-moo Choi , Ju-hee Park
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2006-0102040 20061019
- Main IPC: G11C16/04
- IPC: G11C16/04

Abstract:
A semiconductor memory device may include a semiconductor substrate, a control gate electrode recessed in the semiconductor substrate, a storage node layer between the control gate electrode and the semiconductor substrate, a tunneling insulating layer between the storage node layer and the semiconductor substrate, a blocking insulating layer between the storage node layer and the control gate electrode, and first and second channel regions surrounding the control gate electrode and separated by a pair of opposing separating insulating layers. A method of operating the semiconductor memory device may include programming data in the storage node layer by charge tunneling through the blocking insulating layer, thus achieving relatively high reliability and efficiency.
Public/Granted literature
- US20080094917A1 Method of operating a semiconductor memory device having a recessed control gate electrode Public/Granted day:2008-04-24
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