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US07675388B2 Switchable tunable acoustic resonator using BST material 失效
使用BST材料的可切换可调声谐振器

Switchable tunable acoustic resonator using BST material
Abstract:
An acoustic resonator includes a first electrode, a second electrode, and a barium strontium titanate (BST) dielectric layer disposed between the first electrode and the second electrode, where the acoustic resonator is switched on as a resonator with a resonant frequency if a DC (direct current) bias voltage is applied across the BST dielectric layer. The acoustic resonator is also switched off in no DC bias voltage is applied across the BST dielectric layer. Furthermore, the resonant frequency of the acoustic resonator can be tuned based on a level of the DC bias voltage, with the resonant frequency increasing as the level of the DC bias voltage applied to the BST acoustic resonator increases.
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