A semiconductor package comprises a substrate; a semiconductor die that comprises a set of one or more interconnects on one side to couple to the substrate; and a shape memory alloy layer provided on another side of the semiconductor die to compensate warpage of the semiconductor die. The shape memory alloy layer deforms with warpage of the semiconductor die and changes from the deformed shape to an original shape to flatten the semiconductor die in response to rise of a temperature during coupling of the die to the substrate.