Invention Grant
- Patent Title: Electromechanical non-volatile memory devices
- Patent Title (中): 机电非易失性存储器件
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Application No.: US11876111Application Date: 2007-10-22
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Publication No.: US07675142B2Publication Date: 2010-03-09
- Inventor: Eun-Jung Yun , Sung-Young Lee , Min-Sang Kim , Sung-Min Kim
- Applicant: Eun-Jung Yun , Sung-Young Lee , Min-Sang Kim , Sung-Min Kim
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec
- Priority: KR10-2006-0102696 20061023
- Main IPC: H01L29/84
- IPC: H01L29/84

Abstract:
Electromechanical non-volatile memory devices are provided including a semiconductor substrate having an upper surface including insulation characteristics. A first electrode pattern is provided on the semiconductor substrate. The first electrode pattern exposes portions of a surface of the semiconductor substrate therethrough. A conformal bit line is provided on the first electrode pattern and the exposed surface of semiconductor substrate. The bit line is spaced apart from a sidewall of the first electrode pattern and includes a conductive material having an elasticity generated by a voltage difference. An insulating layer pattern is provided on an upper surface of the bit line located on the semiconductor substrate. A second electrode pattern is spaced apart from the bit line and provided on the insulating layer pattern. The second electrode pattern faces the first electrode pattern.
Public/Granted literature
- US20080093686A1 ELECTROMECHANICAL NON-VOLATILE MEMORY DEVICES Public/Granted day:2008-04-24
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