Invention Grant
- Patent Title: Image sensor and manufacturing method thereof
- Patent Title (中): 图像传感器及其制造方法
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Application No.: US12204914Application Date: 2008-09-05
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Publication No.: US07675101B2Publication Date: 2010-03-09
- Inventor: Joon Hwang
- Applicant: Joon Hwang
- Applicant Address: KR Seoul
- Assignee: Dongbu Hitek Co., Ltd.
- Current Assignee: Dongbu Hitek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Saliwanchik, Lloyd & Saliwanchik
- Priority: KR10-2007-0090979 20070907; KR10-2008-0073161 20080725
- Main IPC: H01L31/062
- IPC: H01L31/062

Abstract:
Provided is an image sensor. The image sensor can include a first substrate comprising a pixel portion in which a readout circuitry is provided and a peripheral portion in which a peripheral circuitry is provided. An interlayer dielectric including lines can be formed on the first substrate to connect with the readout circuitry and the peripheral circuitry. A crystalline semiconductor layer can be provided on a portion of the interlayer dielectric corresponding to the pixel portion through a bonding process. The crystalline semiconductor layer can include a first photodiode and second photodiode. The first and second photodiodes can be defined by device isolation trenches in the crystalline semiconductor layer. A device isolation layer can be formed on the crystalline semiconductor layer comprising the device isolation trenches. An upper electrode layer passes through the device isolation layer to connect with a portion of the first photodiode. An expose portion can be formed in the upper electrode layer to selectively expose an upper region of the first photodiode. A passivation layer can be formed on the first substrate on which the expose portion is provided.
Public/Granted literature
- US20090065828A1 Image Sensor and Manufacturing Method Thereof Public/Granted day:2009-03-12
Information query
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