Invention Grant
- Patent Title: Terminal structure of an ion implanter
- Patent Title (中): 离子注入机的端子结构
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Application No.: US11527842Application Date: 2006-09-27
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Publication No.: US07675046B2Publication Date: 2010-03-09
- Inventor: Kasegn D. Tekletsadik , Russell J. Low
- Applicant: Kasegn D. Tekletsadik , Russell J. Low
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc
- Current Assignee: Varian Semiconductor Equipment Associates, Inc
- Current Assignee Address: US MA Gloucester
- Main IPC: H01J37/317
- IPC: H01J37/317

Abstract:
An apparatus includes a conductive structure and an insulated conductor disposed proximate an exterior portion of the conductive structure to modify an electric field about the conductive structure. The insulated conductor has an insulator with a dielectric strength greater than 75 kilovolts (kV)/inch disposed about a conductor. An ion implanter is also provided. The ion implanter includes an ion source configured to provide an ion beam, a terminal structure defining a cavity, the ion source at least partially disposed within the cavity, and an insulated conductor. The insulated conductor is disposed proximate an exterior portion of the terminal structure to modify an electric field about the terminal structure. The insulated conductor has an insulator with a dielectric strength greater than 75 kV/inch disposed about a conductor.
Public/Granted literature
- US20080073578A1 Terminal structure of an ion implanter Public/Granted day:2008-03-27
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