Invention Grant
US07675019B2 Method and device for adjusting at least one light beam in an optical system
有权
用于调整光学系统中的至少一个光束的方法和装置
- Patent Title: Method and device for adjusting at least one light beam in an optical system
- Patent Title (中): 用于调整光学系统中的至少一个光束的方法和装置
-
Application No.: US10098016Application Date: 2002-03-13
-
Publication No.: US07675019B2Publication Date: 2010-03-09
- Inventor: Holger Birk , Johan Engelhardt
- Applicant: Holger Birk , Johan Engelhardt
- Applicant Address: DE Wetzlar
- Assignee: Leica Microsystems CMS GmbH
- Current Assignee: Leica Microsystems CMS GmbH
- Current Assignee Address: DE Wetzlar
- Agency: Houston Eliseeva LLP
- Priority: DE10111825 20010313
- Main IPC: H01J3/14
- IPC: H01J3/14 ; G02B21/06

Abstract:
A device (70) is disclosed for adjusting a light beam (1) in an optical system (100), whereby the optical system (100) defines an optical axis (60). The device (70) for adjusting comprises means for coupling-in (3) of the light beam into a housing part (80) of the device (70). The means for coupling-in (3) determines a coupling-in point (3a) and a coupled in light beam (9). At least a first and a second photo detector (10, 22) are arranged in different in distances to the coupling-in point. (3a). In the coupled in light beam (9) at least one beam splitter (36) is provided, which directs the coupled in light beam (9) on at least one of the photo detectors (10, 22).
Public/Granted literature
- US20020162976A1 Method and device for adjusting at least one light beam in an optical system Public/Granted day:2002-11-07
Information query