Invention Grant
US07675003B2 Laser irradiation device, patterning method and method of fabricating organic light emitting display (OLED) using the patterning method 有权
激光照射装置,图案化方法和使用图案化方法制造有机发光显示器(OLED)的方法

  • Patent Title: Laser irradiation device, patterning method and method of fabricating organic light emitting display (OLED) using the patterning method
  • Patent Title (中): 激光照射装置,图案化方法和使用图案化方法制造有机发光显示器(OLED)的方法
  • Application No.: US11286411
    Application Date: 2005-11-25
  • Publication No.: US07675003B2
    Publication Date: 2010-03-09
  • Inventor: Jae-Ho LeeTae-Min KangSeong-Taek Lee
  • Applicant: Jae-Ho LeeTae-Min KangSeong-Taek Lee
  • Applicant Address: KR Nongseo-Dong, Giheung-Gu, Yongin, Gyunggi-Do
  • Assignee: Samsung Mobile Display Co., Ltd.
  • Current Assignee: Samsung Mobile Display Co., Ltd.
  • Current Assignee Address: KR Nongseo-Dong, Giheung-Gu, Yongin, Gyunggi-Do
  • Agent Robert E. Bushnell, Esq.
  • Priority: KR10-2004-0101424 20041203
  • Main IPC: B23K26/06
  • IPC: B23K26/06
Laser irradiation device, patterning method and method of fabricating organic light emitting display (OLED) using the patterning method
Abstract:
In a laser irradiation device, a patterning method and a method of fabricating an Organic Light Emitting Display (OLED) using the same. The laser irradiation device includes a light source, a mask, a projection lens, and a Fresnel lens formed at a predetermined portion of the mask to change an optical path. When an organic layer pattern is formed using the laser irradiation device, laser radiation is irradiated onto a region of an organic layer, which is to be cut, and the laser radiation is appropriately irradiated onto a region of the organic layer, which is to be separated from a donor substrate. The laser radiation irradiated onto an edge of the organic layer pattern has a laser energy density greater than that of the laser radiation irradiated onto other portions of the organic layer pattern. As a result, it is possible to form a uniform organic layer pattern and reduce damage of the organic layer.
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