Invention Grant
- Patent Title: Laser beam processing machine
- Patent Title (中): 激光束加工机
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Application No.: US11635539Application Date: 2006-12-08
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Publication No.: US07675002B2Publication Date: 2010-03-09
- Inventor: Keiji Nomaru , Yasuomi Kaneuchi , Hiroshi Morikazu
- Applicant: Keiji Nomaru , Yasuomi Kaneuchi , Hiroshi Morikazu
- Applicant Address: JP Tokyo
- Assignee: Disco Corporation
- Current Assignee: Disco Corporation
- Current Assignee Address: JP Tokyo
- Agency: Smith, Gambrell & Russell, LLP
- Priority: JP2005-362236 20051215
- Main IPC: B23K26/38
- IPC: B23K26/38 ; B23K26/067

Abstract:
A laser beam processing machine comprising a chuck table for holding a workpiece, a laser beam application device for applying a laser beam to the workpiece held on the chuck table, a processing-feed device for moving the chuck table and the laser beam application device relative to each other in a processing-feed direction (X-axis direction), and an indexing-feed device for moving the chuck table and the laser beam application device relative to each other in an indexing-feed direction (Y-axis direction) perpendicular to the processing-feed direction (X-axis direction), wherein the laser beam application device includes a laser oscillation device for oscillating a laser beam, a first acousto-optic deflection device for deflecting the optical axis of a laser beam oscillated by the laser beam oscillation device in the processing-feed direction (X-axis direction), and a second acousto-optic deflection device for deflecting the optical axis of a laser beam oscillated by the laser beam oscillation device in the indexing-feed direction (Y-axis direction).
Public/Granted literature
- US20070138156A1 Laser beam processing machine Public/Granted day:2007-06-21
Information query
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