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US07674574B2 Method of arranging mask patterns 有权
排列掩模图案的方法

Method of arranging mask patterns
Abstract:
A method of arranging mask patterns, which includes a first mask has a first mask pattern, a second mask has a second mask pattern. The distance between the first mask boundary and the first mask pattern boundary is different form the distance between the second mask boundary and the second mask pattern boundary.
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