Invention Grant
- Patent Title: System and method for optical interrogation of micro-mechanical sensors using microcavity interferometry
- Patent Title (中): 使用微腔干涉测量的微机械传感器的光学询问系统和方法
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Application No.: US11559119Application Date: 2006-11-13
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Publication No.: US07673517B2Publication Date: 2010-03-09
- Inventor: Todd H. Stievater , William S Rabinovich , Eric J Houser , Stanley V. Stepnowski , R Andrew McGill
- Applicant: Todd H. Stievater , William S Rabinovich , Eric J Houser , Stanley V. Stepnowski , R Andrew McGill
- Applicant Address: US DC Washington
- Assignee: The United States of America as represented by the Secretary of the Navy
- Current Assignee: The United States of America as represented by the Secretary of the Navy
- Current Assignee Address: US DC Washington
- Agent John J. Karasek; Sally A Ferrett
- Main IPC: G01N29/00
- IPC: G01N29/00

Abstract:
A sensor and a method for sensing a change in mass of a reflective microbeam in a sensor, the sensor having a reflective layer disposed on a substrate and spaced apart from the reflective microbeam. The microbeam receives amplitude modulated laser energy at a first wavelength and is photothermally excited into resonance at the frequency of amplitude modulation, the reflective microbridge and the reflective layer receive optical energy at a second wavelength and reflect the optical energy toward a receiver. A change in reflectivity of the microbeam at different frequencies is determined. A change in reflectivity indicates a change in resonant frequency of the microbeam. Mass of the microbeam changes when a chemoselective material on the microbeam sorbs a target chemical.
Public/Granted literature
- US20070125150A1 System and Method for Optical Interrogation of Micro-Mechanical Sensors Using Microcavity Interferometry Public/Granted day:2007-06-07
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