Invention Grant
- Patent Title: Resolution enhancing technology using phase assignment bridges
- Patent Title (中): 使用相位分配桥梁的分辨率增强技术
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Application No.: US11475480Application Date: 2006-06-26
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Publication No.: US07673277B2Publication Date: 2010-03-02
- Inventor: Chih-Hsien Nail Tang
- Applicant: Chih-Hsien Nail Tang
- Agency: Klarquist Sparkman, LLP.
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G09F9/00

Abstract:
In one embodiment, a spacing is determined for each edge of a number of features in a photolithographic design. The edges have at least a partially predictable layout. Based on the spacing and the predictable layout, a bridge structure is generated. Each bridge of the bridge structure connects one of the edges to an edge of a neighboring feature. Then, the features and the bridge structure are provided for a phase assignment. The phase assignment assigns features at opposite ends of each bridge in the bridge structure to opposite phases. In another embodiment, a sub-resolution assist feature (SRAF) is introduced for an edge of a feature and a bridge is generated from the feature to the SRAF. Then, the feature and the SRAF are assigned to opposite phases based on the relationship defined by the bridge.
Public/Granted literature
- US20060240342A1 Resolution enhancing technology using phase assignment bridges Public/Granted day:2006-10-26
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