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US07672094B2 TMR sensor having an under-layer treated with nitrogen for increased magnetoresistance 有权
TMR传感器具有用氮气处理的底层以提高磁阻

TMR sensor having an under-layer treated with nitrogen for increased magnetoresistance
Abstract:
A tunnel junction TMR magnetoresistive sensor formed on layers having nitrogen interspersed therein. The nitrogenation of the layers on which the sensor is deposited allows the sensor layers to have very smooth, uniform surfaces. This greatly improves sensor performance by, for example, providing a very uniform barrier layer thickness.
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