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US07672046B2 Optical multilayer filter, method for manufacturing the same, and electronic apparatus 有权
光学多层滤光器及其制造方法以及电子设备

Optical multilayer filter, method for manufacturing the same, and electronic apparatus
Abstract:
An optical multilayer filter comprises a substrate, and an inorganic thin film that is composed of a plurality of layers and formed on the substrate. An uppermost surface layer of the inorganic thin film is a silicon oxide layer having a density of from 1.9 g/cm3 to 2.2 g/cm3.
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