Invention Grant
US07672034B2 Method for manufacturing optical modulator, optical modulator, and optical modulation system 有权
光调制器,光调制器和光调制系统的制造方法

  • Patent Title: Method for manufacturing optical modulator, optical modulator, and optical modulation system
  • Patent Title (中): 光调制器,光调制器和光调制系统的制造方法
  • Application No.: US11911314
    Application Date: 2006-04-07
  • Publication No.: US07672034B2
    Publication Date: 2010-03-02
  • Inventor: Yoshikazu Fujimori
  • Applicant: Yoshikazu Fujimori
  • Applicant Address: JP
  • Assignee: Rohm Co., Ltd.
  • Current Assignee: Rohm Co., Ltd.
  • Current Assignee Address: JP
  • Agency: Cantor Colburn LLP
  • Priority: JP2005-113763 20050411
  • International Application: PCT/JP2006/307453 WO 20060407
  • International Announcement: WO2006/109725 WO 20061019
  • Main IPC: G02F1/03
  • IPC: G02F1/03
Method for manufacturing optical modulator, optical modulator, and optical modulation system
Abstract:
A manufacturing method is provided for a light modulation device that improves utilization efficiency of light. After forming a first reflective layer using a metallic material such as Pt or the like, on a substrate, a light modulating film is formed using an electro-optic material in which refractive index changes in accordance with an applied electrical field. After that, planarization is carried out so that irregularities on an upper surface of the light modulating film are less than or equal to 1/100 of the wavelength of light incident on the light modulation device. A transparent electrode is then formed using ITO, ZnO, or the like, on the light modulating film, and a second reflective layer including a dielectric multilayer is formed.
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