Invention Grant
US07671615B2 Method and apparatus for controlling the temperature of electronic components 有权
用于控制电子部件的温度的方法和装置

Method and apparatus for controlling the temperature of electronic components
Abstract:
In a method and an apparatus for measuring temperature-controlled electronic components in a test station, a component to be measured is held and positioned using a chuck, has a temperature-controlled and directed fluid flow applied to it and is electrically contact-connected using probes and is measured. The setting of the temperature of the component to the temperature at which the measurement is intended to be carried out is effected solely using a directed fluid flow at a defined temperature.
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