Invention Grant
- Patent Title: Method and apparatus for controlling the temperature of electronic components
- Patent Title (中): 用于控制电子部件的温度的方法和装置
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Application No.: US11839899Application Date: 2007-08-16
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Publication No.: US07671615B2Publication Date: 2010-03-02
- Inventor: Carel van de Beek , Stefan Kreissig , Volker Hansel , Sebastian Giessmann , Frank-Michael Werner , Claus Dietrich , Jorg Kiesewetter
- Applicant: Carel van de Beek , Stefan Kreissig , Volker Hansel , Sebastian Giessmann , Frank-Michael Werner , Claus Dietrich , Jorg Kiesewetter
- Applicant Address: DE Sacka
- Assignee: SUSS MicroTec Tech Systems GmbH
- Current Assignee: SUSS MicroTec Tech Systems GmbH
- Current Assignee Address: DE Sacka
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent Victor A. Cardona, Esq.
- Priority: DE102006038457 20060816
- Main IPC: G01R31/02
- IPC: G01R31/02

Abstract:
In a method and an apparatus for measuring temperature-controlled electronic components in a test station, a component to be measured is held and positioned using a chuck, has a temperature-controlled and directed fluid flow applied to it and is electrically contact-connected using probes and is measured. The setting of the temperature of the component to the temperature at which the measurement is intended to be carried out is effected solely using a directed fluid flow at a defined temperature.
Public/Granted literature
- US20080042679A1 METHOD AND APPARATUS FOR CONTROLLING THE TEMPERATURE OF ELECTRONIC COMPONENTS Public/Granted day:2008-02-21
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