Invention Grant
- Patent Title: Dynamic quantity sensor
- Patent Title (中): 动态量传感器
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Application No.: US11709271Application Date: 2007-02-22
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Publication No.: US07671432B2Publication Date: 2010-03-02
- Inventor: Tetsuo Fujii
- Applicant: Tetsuo Fujii
- Applicant Address: JP Kariya
- Assignee: DENSO CORPORATION
- Current Assignee: DENSO CORPORATION
- Current Assignee Address: JP Kariya
- Agency: Posz Law Group, PLC
- Priority: JP2002-323896 20021107; JP2003-348253 20031007
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L25/07 ; G01P9/04 ; G01C19/56

Abstract:
A dynamic quantity sensor includes a sensor chip having a movable portion at one surface side thereof and a silicon layer at another surface side thereof. The movable portion is displaced under application of a dynamic quantity. The silicon layer is separated from the movable portion through an insulator. The dynamic quantity sensor also includes a circuit chip for transmitting/receiving electrical signals to/from the sensor chip. The circuit chip is disposed to confront the one surface of the sensor chip through a gap portion and cover the movable portion. The sensor chip and the circuit chip are bonded to each other around the gap portion so that a bonding portion is formed to substantially surround the gap portion and thereby seal the gap portion.
Public/Granted literature
- US20070158822A1 Dynamic quantity sensor Public/Granted day:2007-07-12
Information query
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