Invention Grant
- Patent Title: Method of manufacturing semiconductor device and semiconductor device
- Patent Title (中): 制造半导体器件和半导体器件的方法
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Application No.: US11797046Application Date: 2007-04-30
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Publication No.: US07670860B2Publication Date: 2010-03-02
- Inventor: Takeo Yoshida
- Applicant: Takeo Yoshida
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JPP2006-131706 20060510
- Main IPC: H01L21/311
- IPC: H01L21/311

Abstract:
A method of manufacturing a semiconductor device, the semiconductor device comprising: a semiconductor substrate; a pixel portion including an in-layer lens; and a peripheral circuit portion including a metal wiring portion, the pixel portion and the peripheral circuit portion being on the semiconductor substrate, the method comprising: forming an insulating film in the pixel portion and the peripheral circuit portion, so as to cover the metal wiring portion; providing, on the insulating film, a lens material layer for forming the in-layer lens; forming a resist layer for etching the lens material layer; curing the resist layer; and forming a first region and a second region in the resist layer, wherein a portion of the resist layer in the first region is thicker than that of the resist layer in the second region, the first region being in the peripheral circuit portion and the second region being in the pixel portion.
Public/Granted literature
- US20070262406A1 Method of manufacturing semiconductor device and semiconductor device Public/Granted day:2007-11-15
Information query
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