Invention Grant
- Patent Title: Techniques for providing ion source feed materials
- Patent Title (中): 提供离子源饲料的技术
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Application No.: US11776217Application Date: 2007-07-11
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Publication No.: US07655932B2Publication Date: 2010-02-02
- Inventor: Christopher R. Hatem , Craig R. Chaney , Eric R. Cobb , Joseph C. Olson , Chris Campbell
- Applicant: Christopher R. Hatem , Craig R. Chaney , Eric R. Cobb , Joseph C. Olson , Chris Campbell
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01J49/10
- IPC: H01J49/10 ; H01J27/02

Abstract:
Techniques for providing ion source feed materials are disclosed. In one particular exemplary embodiment, the techniques may be realized as a container for supplying an ion source feed material. The container may comprise an internal cavity to be pre-filled with an ion source feed material. The container may also comprise an outer body configured to be removably loaded into a corresponding housing that is coupled to an ion source chamber via a nozzle assembly. The container may further comprise an outlet to seal in the pre-filled ion source feed material, the outlet being further configured to engage with the nozzle assembly to establish a flow path between the internal cavity and the ion source chamber. The container may be configured to be a disposable component.
Public/Granted literature
- US20080169427A1 TECHNIQUES FOR PROVIDING ION SOURCE FEED MATERIALS Public/Granted day:2008-07-17
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