Invention Grant
- Patent Title: Dice by grind for back surface metallized dies
- Patent Title (中): 用于后表面金属化模具研磨的骰子
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Application No.: US12103878Application Date: 2008-04-16
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Publication No.: US07655539B2Publication Date: 2010-02-02
- Inventor: Craig Hendricks , Eric Woolsey , Jim Murphy
- Applicant: Craig Hendricks , Eric Woolsey , Jim Murphy
- Applicant Address: US DE
- Assignee: Fairchild Semiconductor Corporation
- Current Assignee: Fairchild Semiconductor Corporation
- Current Assignee Address: US DE
- Agency: Kirton & McConkie
- Agent Kenneth E. Horton
- Main IPC: H01L21/78
- IPC: H01L21/78

Abstract:
Semiconductor device processing and methods for dicing a semiconductor wafer into a plurality of individual dies that can have back surface metallization are described. The methods comprise providing a wafer with pre-diced streets in the wafer's front surface, applying a sidewall masking mechanism to the front surface of the wafer so as to substantially fill the pre-diced streets, thinning the back surface of the wafer so as to dice the wafer (e.g., by grinding, etching, or both) and expose a portion of the sidewall masking mechanism from the back surface of the wafer, and applying a material, such as metal, to the back surface of the diced wafer. These methods can prevent the metal from being deposited on die sidewalls and may allow the separation of individual dies without causing the metal to peel from the back surface of one or more adjacent dies. Other embodiments are also described.
Public/Granted literature
- US20090261388A1 DICE BY GRIND FOR BACK SURFACE METALLIZED DIES Public/Granted day:2009-10-22
Information query
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