Invention Grant
- Patent Title: Probe support with shield for the examination of test substrates under use of probe supports
- Patent Title (中): 使用探头支架检测测试基板的探头支架
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Application No.: US11940354Application Date: 2007-11-15
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Publication No.: US07652491B2Publication Date: 2010-01-26
- Inventor: Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
- Applicant: Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
- Applicant Address: DE
- Assignee: SUSS MicroTec Test Systems GmbH
- Current Assignee: SUSS MicroTec Test Systems GmbH
- Current Assignee Address: DE
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Priority: DE102006054693 20061117
- Main IPC: G10R31/28
- IPC: G10R31/28

Abstract:
A probe support for holding probes which serve for electrical contacting of test substrates in a prober for testing purposes comprises a probe card holder, a probe card, and a probe card adapter, The probe card and probe card adapter are electrically connected to one another as well as to a shield of electrically conductive material and are disposed such that the probe card lies in a passageway of a shield. The shield is disposed between the test substrates and the probe card holder and is electrically insulated from the holder. For testing test substrates their positioning with respect to the probes held in this manner is done by angular alignment of the contact surfaces of the test substrates to the sensor tips and the movement of the test substrates along a path which starts from a first reference position and is composed up to the first, and each additional, contact position of an x-component and a y-component.
Public/Granted literature
- US20080116917A1 PROBE SUPPORT AND PROCESS FOR THE EXAMINATION OF TEST SUBSTRATES UNDER USE OF PROBE SUPPORTS Public/Granted day:2008-05-22
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