Invention Grant
US07652270B2 Techniques for ion beam current measurement using a scanning beam current transformer
有权
使用扫描光束电流互感器进行离子束电流测量的技术
- Patent Title: Techniques for ion beam current measurement using a scanning beam current transformer
- Patent Title (中): 使用扫描光束电流互感器进行离子束电流测量的技术
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Application No.: US11758236Application Date: 2007-06-05
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Publication No.: US07652270B2Publication Date: 2010-01-26
- Inventor: Joseph P. Dzengeleski , Costel Biloiu
- Applicant: Joseph P. Dzengeleski , Costel Biloiu
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: G21G5/00
- IPC: G21G5/00 ; G03F7/20

Abstract:
Techniques for ion beam current measurement using a scanning beam current transformer are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion beam current measurement using a transformer. The apparatus may comprise a measurement device positioned adjacent a wafer and an ion dose control module coupled to the measurement device. The measurement device may comprise a transformer through which an ion beam passes onto the wafer. The ion dose control module may calculate ion beam current passing through the transformer and adjust dose based at least in part upon the calculated ion beam current.
Public/Granted literature
- US20080302955A1 TECHNIQUES FOR ION BEAM CURRENT MEASUREMENT USING A SCANNING BEAM CURRENT TRANSFORMER Public/Granted day:2008-12-11
Information query
IPC分类:
G | 物理 |
G21 | 核物理;核工程 |
G21G | 化学元素的转变;放射源 |
G21G5/00 | 通过化学反应进行化学元素的推断转变 |